[19p-C7-1~13] 6.4 New thin-film materials

[19p-C7-10] Synthesis of erbia films using flame deposition method using oxygen for carrier gas

^○Tomoyuki Shirai¹, Atsushi Nakamura^1,2, Shigeo Ohshio¹, Keiji Komatsu¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹, Chubu Chelest Co., Ltd.²)

Keywords:エルビア,フレームデポジション法,キャリアガス