Synthesis of Y<sub>2</sub>O<sub>3</sub> films from Y-EDTA complexes prepared by various milling techniques

Keiji Komatsu

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[19p-C7-1~13] 6.4 New thin-film materials

Thu. Sep 19, 2013 2:00 PM - 5:30 PM C7 (TC3 1F-117)

4:45 PM - 5:00 PM

[19p-C7-11] Synthesis of Y₂O₃ films from Y-EDTA complexes prepared by various milling techniques

^○(PC)Keiji Komatsu¹, Tetsuo Sekiya¹, Ayumu Toyama¹, Atsushi Nakamura^1,2, Shigeo Ohshio¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹, Chubu Chelest Co., Ltd.²)

Keywords:Y2O3,Y-EDTA錯体,粉砕処理

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Presentation information

[19p-C7-1~13] 6.4 New thin-film materials

[19p-C7-11] Synthesis of Y2O3 films from Y-EDTA complexes prepared by various milling techniques

[19p-C7-11] Synthesis of Y₂O₃ films from Y-EDTA complexes prepared by various milling techniques