The 74th JSAP Autumn Meeting,2013

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13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[19p-C8-1~18] 13.6 Silicon devices / Integration technology

Thu. Sep 19, 2013 1:15 PM - 6:30 PM C8 (TC3 2F-201)

4:30 PM - 4:45 PM

[19p-C8-11] Experimental Study on 2D-Si layers for Future Several-nm CMOS (V)

○Yuta Nakahara1, Yusuke Nagata1, Yuya Suzuki1, Takashi Aoki1, Toshiyuki Sameshima2, Tomohisa Mizuno1 (Kanagawa Univ.1, Tokyo Univ. Agri. Tech.2)

Keywords:CMOS,不純物,フォノン閉じ込め効果