The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Oral presentation

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[19p-C8-1~18] 13.6 Silicon devices / Integration technology

Thu. Sep 19, 2013 1:15 PM - 6:30 PM C8 (TC3 2F-201)

4:00 PM - 4:15 PM

[19p-C8-9] Experimental Study on 2D-Si Layers for Future Several-nm CMOS (III)

○Yuusuke Nagata1, Yuuta Makahara1, Yuuya Suzuki1, Takashi Aoki1, Toshiyuki Samejima2, Tomohirsa Mizuno1 (Kanagawa Univ.1, Tokyo Univ. Agri. Tech.2)

Keywords:2DSi