Annealing effect on ultra-high-Q micromechanical resonators using strained GaNAs

Presentation information

Oral presentation

15. Crystal Engineering » 15.3 III-V-group epitaxial crystals

Thu. Sep 19, 2013 1:00 PM - 5:45 PM D3 (MK 2F-201)

2:15 PM - 2:30 PM

^○Koji Onomitsu¹, Manabu Mitsuhara², Yoshiharu Krockenberger¹, Hideki Yamamoto¹, Hiroshi Yamaguchi¹ (NTT BRL¹, NTT Photonics Labs.²)

Keywords:MBE,GaNAs,MEMS