The 74th JSAP Autumn Meeting,2013

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Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology

[19p-D7-1~17] 14.3 Electron devices and Process technology

Thu. Sep 19, 2013 1:00 PM - 5:45 PM D7 (MK 3F-302)

4:15 PM - 4:30 PM

[19p-D7-12] Transcription of pattern on GaAs(001) substrate using porous aluminum mask

○(M1)Takenori Yamazaki1, Yoshitaka Morishita1 (Tokyo Univ. of Agri. & Tech1)

Keywords:陽極酸化,ポーラスアルミナ