The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology

[19p-D7-1~17] 14.3 Electron devices and Process technology

Thu. Sep 19, 2013 1:00 PM - 5:45 PM D7 (MK 3F-302)

5:30 PM - 5:45 PM

[19p-D7-17] Evaluation and fabrication of metallo-dielectric semiconductor pillar nanocavities

Ryo Takemoto1, Nagisa Ishihara1, Hiroyuki Kurosawa1, Ikuo Suemune1 (RIES Hokkaido Univ.1)

Keywords:微小光共振器,金属埋め込み