[19p-P2-1~19] 9.2 Nanowires, nanoparticles

[19p-P2-18] Characterization of Carrier Traps in Silicon Nanocrystal Films Prepared by VHF Plasma

^○Nobuhiro Kondo¹, Kengo Funaki¹, Yoshifumi Nakamine¹, Kouichi Usami¹, Tetsuo Kodera¹, Yukio Kawano¹, Shunri Oda¹ (QNERC¹)

Keywords:シリコン,ナノ結晶