[19p-P3-1~6] 9.3 Nanoelectronics

[19p-P3-3] Fabrication of Integrated Series-Parallel-Connected Nanogaps by Field-Emission-Induced Electromigration

^○Takahiro Toyonaka¹, Mitsuki Ito¹, Akihiro Hirata¹, jun-ichi Shirakashi¹ (Tokyo Univ. of Agr. & Tech.¹)

Keywords:ナノギャップ,集積化,エレクトロマイグレーション