[19p-P3-1~6] 9.3 Nanoelectronics

[19p-P3-6] Simultaneous Control of Electrical Properties of Integrated Nanogaps by Field-Emission-Induced Electromigration

^○Mitsuki Ito¹, Akihiro Hirata¹, Takahiro Toyonaka¹, Jun-ichi Shirakashi¹ (Tokyo Univ. of Agr. & Tech.¹)

Keywords:ナノギャップ,集積化,エレクトロマイグレーション