[20a-A8-1~12] 5.3 Optical Control

[20a-A8-2] Vertically-Curved Silicon Waveguide using Ion-Implantation Method

^○Tomoya Yoshida¹, Ryohei Takei¹, Takashi Nishi¹, Syougo Tajima², Masao Suzuki¹, Emiko Omoda¹, Masayoshi Nagao¹, Noboru Miura², Masahiko Mori¹, Youichi Sakakibara¹ (AIST¹, Meiji Univ.²)

Keywords:シリコンフォトニクス,イオン照射技術