[20a-A8-1~12] 5.3 Optical Control

△ [20a-A8-4] Characteristics Uniformity of Ring Resonators Fabricated on 300 mm SOI Wafer

^○Munetoshi Soma¹, Shu Hirano¹, Yuichiro Tanushi¹, Tomohiro Kita¹, Munehiro Toyama², Tsukuru Sano², Tsuyoshi Horikawa², Hirohito Yamada¹ (Tohoku Univ.¹, AIST²)

Keywords:シリコンフォトニクス