[20a-A8-1~12] 5.3 Optical Control

▲ [20a-A8-5] A non-damage method for the detection of the fabrication errors of microring resonators

^○(PC)Jingnan Cai¹, Shinya Takita¹, Yasuhiko Ishikawa¹, Kazumi Wada¹ (Univ. of Tokyo¹)

Keywords:作製誤差,無損傷検出