The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[20a-B4-1~11] 13.5 Si process technology

Fri. Sep 20, 2013 9:00 AM - 12:00 PM B4 (TC2 1F-106)

11:30 AM - 11:45 AM

[20a-B4-10] Cleanroom-Free Minimal Air Circulation System For PLAD

○Takashi Yajima1, Sommawan Khumpuang1,2, Hitoshi Maekawa1,2, Shiro Hara1,2 (MINIMAL1, AIST2)

Keywords:ミニマルファブ,パーティクル