The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[20a-B4-1~11] 13.5 Si process technology

Fri. Sep 20, 2013 9:00 AM - 12:00 PM B4 (TC2 1F-106)

11:45 AM - 12:00 PM

[20a-B4-11] Quick Thermal Oxidation Process using Minimal Resistance Furnace

Shinnosuke Suzuki1,2, Ayami Yaginuma1,2, Kiyohiko Morikawa1,2, Masashi Hattori1,2, katsuhiko Nakato2, Takanori Mikahara2, Ikeda Shinichi2,3, Sommawan Khumpuang2,3, Shiro Hara2,3 (KOYO Thermo Systems1, MINIMAL2, AIST3)

Keywords:半導体,ミニマル,シリコン