11:45 AM - 12:00 PM
[20a-B4-11] Quick Thermal Oxidation Process using Minimal Resistance Furnace
Keywords:半導体,ミニマル,シリコン
Oral presentation
13. Semiconductors A (Silicon) » 13.5 Si process technology
Fri. Sep 20, 2013 9:00 AM - 12:00 PM B4 (TC2 1F-106)
11:45 AM - 12:00 PM
Keywords:半導体,ミニマル,シリコン