[20a-B5-1~11] 15.4 III-V-group nitride crystals

△ [20a-B5-4] Fabrication of single crystalline p-i-n nanocolumns on sputter-deposited AlN buffers

^○Hiroaki Hayashi¹, Taiichirou Ozaki¹, Isamu Matsuyama¹, Katsumi Kishino^1,2 (Sophia Univ.¹, Sophia NTC²)

Keywords:スパッタ膜上単結晶,窒化物半導体,MBE成長