The 74th JSAP Autumn Meeting,2013

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Oral presentation

09. Applied Materials Science » 9.3 Nanoelectronics

[20a-C11-1~11] 9.3 Nanoelectronics

Fri. Sep 20, 2013 9:00 AM - 12:00 PM C11 (TC3 2F-210)

9:45 AM - 10:00 AM

[20a-C11-4] Formation of High Density Fe-Nanodots on SiO2 Induced by Remote Hydrogen Plasma

○Hai Zhang1, Ryo Fukuoka1, Yuuki Kabeya1, Katsunori Makihara1, Seiichi Miyazaki1 (Grad. School of Eng. Nagoya Univ.1)

Keywords:ナノドット,鉄,水素プラズマ