[20a-C8-1~12] 13.6 Silicon devices / Integration technology

[20a-C8-1] Contact Hole Fabrication Using Directed Self-Assembly Lithography

^○Ayako Kawanishi¹, Yuriko Seino¹, Masahiro Kanno¹, Hirokazu Kato¹, Hironobu Sato¹, Katsutoshi Kobayashi¹, Hiroki Yonemitsu¹, Mitsuhiro Omura¹, Yusuke Kasahara¹, Tsubasa Imamura¹, Noriko Sakurai¹, Tsukasa Azuma¹ (Toshiba corporation¹)

Keywords:Directed Self-Assembly,自己組織化リソグラフィ