9:00 AM - 9:15 AM
[20a-C8-1] Contact Hole Fabrication Using Directed Self-Assembly Lithography
Keywords:Directed Self-Assembly,自己組織化リソグラフィ
Oral presentation
13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology
Fri. Sep 20, 2013 9:00 AM - 12:15 PM C8 (TC3 2F-201)
9:00 AM - 9:15 AM
Keywords:Directed Self-Assembly,自己組織化リソグラフィ