[20a-C8-1~12] 13.6 Silicon devices / Integration technology

▲ [20a-C8-9] Analysis of Photoresponse in SOI FinFET

^○(D)Dedy Putranto^1,3, Kazuhiko Endo², Meishoku Masahara², Hiroaki Satoh¹, Atsushi Ono¹, Purnomo Priambodo³, Djoko Hartanto³, Hiroshi Inokawa¹ (Res. Inst. of Electron., Shizuoka Univ.¹, Nanoelectron. Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol.², Electrical Eng. Dept., Univ. of Indonesia³)

Keywords:SOI FINFET,Photoresponse Characteristics,Single-Photon Detection