Stress superposition from Heterogeneous Origins Evaluated by Finite Element Method Simulation

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.1 Basic properties and their evaluation

Fri. Sep 20, 2013 9:00 AM - 12:15 PM C9 (TC3 2F-202)

11:30 AM - 11:45 AM

^○Motohiro Tomita^1,2, Daisuke Kosemura¹, Atsushi Ogura¹ (Meiji Univ.¹, JSPS Research Fellow DC²)

Keywords:歪Si,シミュレーション