9:00 AM - 9:15 AM
[20a-C9-1] Stress evaluation of 2MeV electron irradiated strained-Si/relaxed-Si0.7Ge0.3/Si-substrate
○(B)Eishiro Murakami1, Toshiyuki Nakashima2,3, Masashi Yoneoka1, Tsunoda Isao1, Takakura Kenichiro1, Naka Nobuyuki4, Suemasu Takashi5 (Kumamoto National College of Technology1, Miyazaki Univ.2, Chuo Denshi Kogyo Co. Ltd.3, HORIBA Ltd.4, Tsukuba Univ.5)