[20a-C9-1~12] 13.1 Basic properties and their evaluation

[20a-C9-4] Size Effects in Ultraviolet Raman Spectra of Few-Nanometer-Thick SOI

^○Tetsuya Tada¹, Vladimir Poborchii¹, Yukinori Morita², Shinji Migita², Pavel Geshev³, Toshihiko Kanayama⁴ (AIST-NeRI¹, GNC-AIST², Institute of Thermophysics³, AIST⁴)

Keywords:ラマン散乱,閉じ込め効果,ナノ構造