[20a-C9-1~12] 13.1 Basic properties and their evaluation

[20a-C9-5] Characterization of Electron Emission from High Density Self-aligned Si-based Quantum Dots by Conducting-Probe Atomic Force Microscopy

^○(M2)Daichi Takeuchi¹, Katsunori Makihara¹, Mitsuhisa Ikeda², Seiichi Miyazaki¹ (Nagoya Univ.¹, Hiroshima Univ.²)

Keywords:半導体,電子放出,量子ドット