[20a-D6-1~11] 14.1 Physical properties of exploratory materials

[20a-D6-6] A study on carrier density of \beta-FeSi₂ formed by Fe/Si multi-layered Sputtering

^○Takafumi Katou¹, Taichi Inamura¹, Akito Sasaki³, Katsuaki Aoki³, Kuniyuki Kakushima², Yoshinori Kataoka², Akira Nishiyama², Nobuyuki Sugii², Hitoshi Wakabayashi², Kazuo Tsutsui², Kenji Natori¹, Hiroshi Iwai¹ (Tokyo Tech.FRC¹, Tokyo Tech IGSSE², Toshiba Material Co.,LTD³)

Keywords:FeSi2,環境半導体,キャリア密度