[20p-A8-1~8] 5.3 Optical Control

[20p-A8-3] Polarization Dependence of Spectroscopic Sensitivity of SOI Photodiode with Concentric Metal Grating

^○Hiroaki Satoh^1,2, Shohei Iwata², Atsushi Ono^1,2, Hiroshi Inokawa^1,2 (Shizuoka Univ.¹, Shizuoka Univ.²)

Keywords:回折格子,偏光依存性,SOIフォトダイオード