The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[20p-B4-1~8] 13.5 Si process technology

Fri. Sep 20, 2013 1:00 PM - 3:00 PM B4 (TC2 1F-106)

1:00 PM - 1:15 PM

[20p-B4-1] Schottky barrier elimination mechanism by pinnig at S-pair in Si

○Koichi Kato1, Takao Marukame1, Yoshifumi Nishi1, Yuichiro Mitani1 (Toshiba R&D Cent.1)

Keywords:ショットキー,硫黄,障壁