The 74th JSAP Autumn Meeting,2013

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13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[20p-C8-1~5] 13.6 Silicon devices / Integration technology

Fri. Sep 20, 2013 1:15 PM - 2:30 PM C8 (TC3 2F-201)

2:00 PM - 2:15 PM

[20p-C8-4] Transport via dopant-quantum-dots fabricated by thermal diffusion through nano-masks

○(P)Daniel Moraru1, Arup Samanta1, Le The Anh2, Takeshi Mizuno1, Hiroshi Mizuta2,3, Michiharu Tabe1 (Shizuoka Univ., RIE1, JAIST2, Univ. Southampton3)

Keywords:single dopant,SOI-FET