1:30 PM - 1:45 PM
[20p-D7-3] Annealing Temperture Dependent Contact Resistance of TiC Electrodes on AlGaN/GaN
Keywords:AlGaN/GaN,コンタクト抵抗,TiC
Oral presentation
14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology
Fri. Sep 20, 2013 1:00 PM - 3:00 PM D7 (MK 3F-302)
1:30 PM - 1:45 PM
Keywords:AlGaN/GaN,コンタクト抵抗,TiC