^○Ryohei Takei^1,2, Masao Suzuki^1,2, Emiko Omoda^1,2, Syoko Manako^1,2, Toshihiro Kamei^1,2, Masahiko Mori^1,2, Youichi Sakakibara^1,2 (AIST¹, PECST²)

^○Hiroyuki Takahashi^1,2, Masashi Yamagishi^1,3, Naoki Hirayama^1,3, Shigeru Saitou^1,3, Yoshiji Noguchi^1,3, Tsuyoshi Horikawa^1,3 (PECST¹, PETRA², ICAN-AIST³)

^○Nobuaki Hatori^1,2, Takanori Shimizu^1,2, Makoto Okano^2,3, Masashige Ishizaka^1,2, Tsuyoshi Yamamoto^1,2, Yutaka Urino^1,2, Masahiko Mori^2,3, Takahiro Nakamura^1,2, Yasuhiko Arakawa^2,4 (PETRA¹, PECST², AIST³, IIS, Univ. of Tokyo⁴)

^○Hiroyuki Ito¹, Norihiro Ishikura¹, Toshihiko Baba¹ (Yokohama National University¹)

^○Hong C. Nguyen¹, Naoya Yazawa¹, Satoshi Hashimoto¹, Toshihiko Baba¹ (Yokohama Nat'l Univ.¹)

^○Yuki Ikku¹, Masafumi Yokoyama¹, Osamu Ichikawa², Masahiko Hata², Mitsuru Takenaka¹, Shinichi Takagi¹ (Univ. Tokyo¹, Sumitomo Chemical Co. Ltd.²)

^○Shinsuke Tanaka^1,2, Seok-Hwan Jeong^1,2, Shigeaki Sekiguchi^1,2, Tomoyuki Akiyama^1,2, Teruo Kurahashi^1,2, Yu Tanaka^1,2, Ken Morito^1,2 (PETRA¹, Fujitsu laboratories ltd.²)

^○Tomohiro Kita¹, Keita Nemoto¹, Hirohito Yamada¹ (Tohoku Univ.¹)

^○（M1）Tatsuji Kaiwa¹, Yu Horie¹, Yasuhiko Ishikawa¹, Kazumi Wada¹ (Univ. of Tokyo¹)

^○Kotaro Takeda², Tatsuro Hiraki^1,2, Tai Tsuchizawa^1,2, Hidetaka Nishi^1,2, Kou Rai^1,2, Hiroshi Fukuda^1,2, Yasuhiko Ishikawa³, Kazumi Wada³, Koji Yamada^1,2 (NTT Nanophotonics center¹, NTT Microsystem Integration Labs.², Univ. of Tokyo³)

^○Satoshi Kako¹, Katsuya Oda^2,3,4, Kazuki Tani^2,3,4, Tatemi Ido^2,3,4, Yasuhiko Arakawa¹ (IIS Univ. Tokyo¹, PETRA², PECST³, CRL Hitachi⁴)

^○Kakuro Hirai¹, Takahiro Araki¹, Jingnan Cai¹, Kazumi Wada¹, Yasuhiko Ishikawa¹, Katsuyoshi Hayashi², Tsutomu Horiuchi², Yuzuru Iwasaki², Yuko Ueno², Emi Tamechika² (Univ. of Tokyo¹, NTT MI Labs²)