[27a-G20-1~9] 15.5 IV-group crystals and IV-IV-group mixed crystals

[27a-G20-5] △GeSn film deposition using Metal Organic Chemical Vapor Deposition

^○Kohei Suda¹, Tomohiro Uno¹, Tatsuya Miyakawa¹, Hideaki Machida², Masato Ishikawa², Hiroshi Sudo², Yoshio Ohshita³, Atsushi Ogura¹ (Meiji Univ.¹, Gas-phase Growth², Toyota Technological Inst.³)

Keywords:GeSn、MOCVD