^○（B）Yuki Ito¹, Shinji Hatakeyama¹, Takuya Matsuo², Katsuyoshi Washio^1,2 (Tohoku Univ.¹, Tohoku UniV.²)

^○Shinji Hatakeyama¹, Yuki Ito¹, Takuya Matsuo², Katsuyoshi Washio² (Tohoku Univ.¹, Tohoku Univ.²)

^○Masashi Kurosawa^1,2, Shohei Kidowaki¹, Takanori Asano¹, Noriyuki Taoka¹, Osamu Nakatsuka¹, Shigeaki Zaima¹ (Nagoya Univ.¹, JSPS²)

^○Shohei Kidowaki¹, Takanori Asano¹, Masashi Kurosawa^1,2, Noriyuki Taoka¹, Osamu Nakatsuka¹, Shigeaki Zaima¹ (Nagoya Univ.¹, JSPS²)

^○Kohei Suda¹, Tomohiro Uno¹, Tatsuya Miyakawa¹, Hideaki Machida², Masato Ishikawa², Hiroshi Sudo², Yoshio Ohshita³, Atsushi Ogura¹ (Meiji Univ.¹, Gas-phase Growth², Toyota Technological Inst.³)

^○Shinichi Ike¹, Yoshihiko Moriyama², Masashi Kurosawa^1,3, Noriyuki Taoka¹, Osamu Nakatsuka¹, Yasuhiko Imai⁴, Shigeru Kimura⁴, Tsutomu Tezuka², Shigeaki Zaima¹ (Graduate School of Eng. Nagoya Univ.¹, AIST-GNC², JSPS Research Fellow (PD)³, JASRI⁴)

^○Takanori Asano¹, Masashi Kurosawa^1,2, Noriyuki Taoka¹, Mitsuo Sakashita¹, Osamu Nakatsuka¹, Shigeaki Zaima¹ (Graduate School of Eng., Nagoya Univ.¹, JSPS Research Fellow (PD)²)

^○Shunsuke Asaba¹, Takashi Yamaha¹, Masashi Kurosawa^1,2, Mitsuo Sakashita¹, Noriyuki Taoka¹, Osamu Nakatsuka¹, Shigeaki Zaima¹ (Nagoya Univ.¹, JSPS Research Fellow (PD)²)

^○Hiroaki Nishikawa¹, Yuichiro Suzuki¹, Masahiro Matsue¹, Takuji Hosoi¹, takayoshi Shimura¹, Heiji Watanabe¹ (Osaka Univ.¹)

^○Koki Nakazawa¹, Kaoru Toko², Noritaka Usami³, Takashi Suemasu² (Univ. of Tsukuba¹, Univ. of Tsukuba², Tohoku Univ.³)

^○Ryohei Numata¹, Kaoru Toko¹, Noritaka Usami^2,3, Takashi Suemasu^1,3 (Univ. of Tsukuba¹, Tohoku Univ.², JST-CREST³)

^○Ryohei Numata¹, Kaoru Toko¹, Noritaka Usami^2,3, Takashi Suemasu^1,3 (Univ. of Tsukuba¹, Tohoku Univ.², JST-CREST³)

^○Jonghyeok Park^1,2, Akira Ooato¹, Tsuneharu Suzuki¹, Taizoh Sadoh¹, Masanobu Miyao¹ (Kyushu Univ.¹, JSPS Research Fellow²)

^○Yuki Maruyama¹, Shota Kino¹, Akira Heya¹, Naoto Matsuo¹, Sho Amano², Syuji Miyamoto², Kazuhiro Kanda², Takayasu Mochizuki², Kaoru Toko³, Taizoh Sadoh³, Masanobu Miyao³ (Univ.of Hyogo¹, LASTI Univ.of Hyogo², Kyusyu Univ.³)

^○Yuki Tojo¹, Yuki Kinoshita¹, Ryo Matsumura¹, Tomoaki Nishimura², Taizoh Sadoh¹, Masanobu Miyao¹ (Kyushu Univ.¹, Research Center of Ion Beam Technology, Hosei Univ.²)

^○Hironori Chikita¹, Ryo Matsumura¹, Yuki Tojo¹, Yuki Kinoshita¹, Taizoh Sadoh¹, Masanobu Miyao¹ (Dept. Electronics, Kyushu Univ.¹)

^○Shunpei Muta¹, Masanao Takahashi¹, M. Anisuzzaman¹, Masanobu Miyao¹, Taizoh Sadoh¹ (Kyushu Univ.¹)

^○Ryo Matsumura¹, Yuki Tojo¹, Masashi Kurosawa^1,2, Taizoh Sadoh¹, Masanobu Miyao¹ (Dept. Electronics, Kyushu Univ.¹, JSPS Research Fellow²)

^○Ryusuke Kato¹, Ryo Matsumura¹, Tojo Yuki¹, Taizoh Sadoh¹, Masanobu Miyao¹ (Dept. Electronics. Kyushu Univ.¹)

^○Takahiro Tsukamoto¹, Nobumitsu Hirose², Akifumi Kasamatsu², Takashi Mimura², Toshiaki Matsui², Yoshiyuki Suda¹ (Tokyo Univ. Agric. Technol.¹, NICT²)

^○（D）Motoki Satoh¹, Keisuke Arimoto¹, Junji Yamanaka¹, Kiyokazu Nakagawa¹, Kentarou Sawano², Yasuhiro Shiraki² (CCST Univ. of Yamanashi¹, ARL Tokyo City Univ.²)

^○（M2）Kazuhiro Gotoh^1,2, Ryuji Oshima², Takeyoshi Sugaya², Isao Sakata², Koji Matsubara², Michio Kondo^1,2 (Tokyo Tech¹, AIST²)

^○Hiroshi Furukawa¹, Shoichiro Sakai¹, Keisuke Arimoto¹, Junji Yamanaka¹, Kiyokazu Nakagawa¹, Yusuke Hoshi², Noritaka Usami² (CCST Univ. of Yamanashi¹, IMR Tohoku Univ.²)