[27p-G20-1~10] 15.5 IV-group crystals and IV-IV-group mixed crystals

[27p-G20-5] △Photon energy dependence of soft X-ray crystallization for a-Ge and a-SiGe films

^○Yuki Maruyama¹, Shota Kino¹, Akira Heya¹, Naoto Matsuo¹, Sho Amano², Syuji Miyamoto², Kazuhiro Kanda², Takayasu Mochizuki², Kaoru Toko³, Taizoh Sadoh³, Masanobu Miyao³ (Univ.of Hyogo¹, LASTI Univ.of Hyogo², Kyusyu Univ.³)

Keywords:結晶化、Ge、X線