[27a-PB4-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[27a-PB4-3] Evaluation of Defects in Crystalline IGZO Powder Induced by Plasma

^○Tokiyoshi Matsuda^1,2, Daiki Nishimoto¹, Kota Takahashi¹, Taiki Ueno¹, Mutsumi Kimura^1,2 (Ryukoku Univ.¹, Ryukoku Univ. JRCST²)

Keywords:格子欠陥、電子スピン共鳴、酸化物半導体