[27a-PB4-4] Dry etching process for a-IGZO device fabrication
Keywords:IGZO、RIE、ドライエッチング
Presentation information
Regular sessions(Poster presentation)
21. Joint Session K » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
[27a-PB4-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
Wed. Mar 27, 2013 9:30 AM - 11:30 AM PB4 (2nd gymnasium)