[27a-PB4-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[27a-PB4-5] Low Temperature Fabrication of ZnO-SnO₂ TFT

^○Kazuo Satoh¹, Yoshiharu Yamada¹, Shuichi Murakami¹, Yoshiharu Kakehi¹, Yoshiaki Sakurai¹ (TRI-Osaka¹)

Keywords:トランジスタ、薄膜、ZTO