[27a-PB4-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[27a-PB4-6] Sol-Gel ZnO films crystallized under an electric field and Thin Film Transistor

^○Masaki Kashiwaya¹ (Akita Prefectural Univ.¹)

Keywords:薄膜トランジスタ、酸化亜鉛、ゾルゲル