[27a-PB4-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[27a-PB4-7] Surface Morphology and Crystalline Structure of Transparent Conductive ZnO Films Formed by Magnetron Sputtering

^○Naoki Yamamoto¹, Kirihiko Morisawa¹ (Kochi Univ. of Technol.¹)

Keywords:ZnO、透明導電膜、表面形態