[27p-A2-1~14] 3.4 Optical measurement

[27p-A2-12] Accuracy estimation on surface profile measurement of mirror polish surface using Shack Hartmann method

^○Masato Kannaka¹, Tsutomu Morimoto¹, Kazuhiko Tahara², Kazuyoshi Senoo² (Kobe Steel,Ltd.¹, Kobelco Research Institute,Inc²)

Keywords:形状測定