Effect of Mask Line-Edge-Roughness on Wiggling

Presentation information

Regular sessions(Oral presentation)

08. Plasma Electronics » 8.4 Plasma etching

Wed. Mar 27, 2013 1:30 PM - 6:00 PM A3 (K1 2F-201)

^○Naoyuki Kofuji¹, Nobuyuki Negishi¹, Hiroaki Ishimura², Toshiaki Nishida², Hitoshi Kobayashi² (Hitachi CRL¹, Hitachi High-Tech²)

Keywords:LER、Wiggling