[27p-A3-1~17] 8.4 Plasma etching

[27p-A3-15] △Mechanism of Generating Active Species and Etch Reaction in CH_xF_y Plasma (II)

^○Yusuke Kondo¹, Yudai Miyawaki¹, Keigo Takeda¹, Hiroki Kondo¹, Kenji Ishikawa¹, Toshio Hayashi¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹)

Keywords:Fluorocarbon、Model