[27p-A3-1~17] 8.4 Plasma etching

[27p-A3-16] Real-time / in-situ electron spin resonance analysis of plasma surface interactions (4)

Kenji Ishikawa¹, Hideo Horibe², Keigo Takeda¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori¹, ^○Haoran Wang¹ (Nagoya Univ¹, Kanazawa Inst. Technol²)

Keywords:プラズマ、ESR