[27p-A6-1~16] 6.2 Carbon-based thin films

[27p-A6-15] △The reduction of contact resistance for metal/n-type diamond interface using carbon intermediate layer

^○（D）Tsubasa Matsumoto^1,2,3, Kazuya Shirota^2,3, Hiromitsu Kato^2,3, Norio Tokuda^2,3,4, Daisuke Takeuchi^2,3, Toshiharu Makino^2,3, Masahiko Ogura^2,3, Hideyo Okushi^2,3, Satoshi Yamasaki^1,2,3 (Univ. of Tsukuba¹, AIST², CREST³, Kanazawa Univ.⁴)

Keywords:ダイヤモンド、コンタクト、グラフェン