[27p-A6-1~16] 6.2 Carbon-based thin films

[27p-A6-14] △The comparison between (111) and (100) of contact resistance for metal /p-type diamond

^○Kazuya Shirota^1,3,4, Tsubasa Matsumoto^1,2,4, Masahiko Ogura^1,4, Hiromitsu Kato^1,4, Toshiharu Makino^1,4, Daisuke Takeuchi^1,4, Hideyo Okushi^1,4, Satoshi Yamasaki^1,2,4 (AIST¹, Univ. of Tsukuba², Univ. of Meiji³, CREST⁴)

Keywords:diamond p-type contact