[27p-A6-1~16] 6.2 Carbon-based thin films

[27p-A6-3] △Controlled doping of nitrogen-vacancy centers in a diamond thin film fabricated using nitrogen-doped chemical vapor deposition on micro-patterned substrate

^○Shuhei Tomizawa¹, Kohei Ohashi¹, Kohei Itoh¹, Junko Hayase¹, Hideyuki Watanabe², Hitoshi Umezawa², Shinichi Shikata² (Keio Univ.¹, AIST²)

Keywords:ダイヤモンド、NVセンター、CVD