[27p-A6-1~16] 6.2 Carbon-based thin films

[27p-A6-4] Fabrication of the ordered array of optical centers in diamond by low-energy ion implantation Ⅱ

^○Syuto Tamura¹, Akira Komatsubara¹, Tokuyuki Teraji², Shinobu Onoda³, Takeshi Ohshima³, Christoph Müller⁴, Boris Naydenov⁴, Liam McGuinness⁴, Takahiro Shinada⁵, Junichi Isoya⁶, Fedor Jelezko⁴, Takashi Tanii¹ (Waseda Univ.¹, NIMS², JAEA³, Ulm Univ.⁴, AIST⁵, Tsukuba Univ.⁶)

Keywords:単一光子源、Si-V、発光センター