[27p-A6-9] △Passivation of hydrogen-terminated diamond surface using highly insulating and environment-resistant ALD-Al2O3 film
Keywords:Al2O3、水素終端、パッシベーション
Presentation information
Regular sessions(Oral presentation)
06. Thin Films and Surfaces » 6.2 Carbon-based thin films
[27p-A6-1~16] 6.2 Carbon-based thin films
Wed. Mar 27, 2013 1:30 PM - 6:15 PM A6 (K1 3F-305)