[27p-A7-1~17] 8.3 Plasma deposition of thin film and surface treatment

[27p-A7-5] Synthesis of diamond thin films Using Photoemission-Assisted Plasma-Enhanced Chemical Vapor Deposition

^○Mayuri Kawata¹, Yoshihiro Ojiro¹, Shuichi Ogawa¹, Tomoaki Mazuzawa², Ken Okano², Yuko Takakuwa¹ (Tohoku Univ.¹, ICU²)

Keywords:光電子制御プラズマ、ダイヤモンド、負性電子親和力