[27p-B6-1~10] 1.3 Novel technologies

[27p-B6-7] Fabrication of thin-film spiral antennas for 220 GHz range on Si₃N₄ membrane

^○Akihito Matsushita¹, Son Le Ngoc¹, Takashi Tachiki¹, Takashi Uchida¹ (NDA¹)

Keywords:テラヘルツ