[27p-B6-1~10] 1.3 Novel technologies

[27p-B6-9] Polymer-based photonic nanostructure using electron beam pattern

^○Tatsuro Endo¹, Zenku Haga², Tetsuo Hase², Hideaki Hisamoto¹ (Osaka Prefecture Univ.¹, Meiho Co., Ltd.²)

Keywords:フォトニックナノ構造、電子線描画